Nanosatellites and MEMS fabrication by laser microprocessing

Henry Helvajian; Peter D. Fuqua; William W. Hansen; Siegfried W. Janson

doi:10.1117/12.405723

6 November 2000 Nanosatellites and MEMS fabrication by laser microprocessing

Henry Helvajian, Peter D. Fuqua, William W. Hansen, Siegfried W. Janson

Proceedings Volume 4088, First International Symposium on Laser Precision Microfabrication; (2000) https://doi.org/10.1117/12.405723
Event: First International Symposium on Laser Precision Microfabrication (LPM2000), 2000, Omiya, Saitama, Japan

Abstract

By definition Nanosatellites are space systems that can weigh 1010 kg and can perform unique missions (e.g. global cloud cover monitoring, store-and-forward communications) acting either in constellation of distributed sensor-nodes or in a many-satellite platoon that flies in formation. The Aerospace Corporation has been exploring the application of microelectronics fabrication and advanced packaging technology to the development of a mass-producible nanosatellite. Particular attention is being directed at M³ (Micromachining/MEMS/Microsystems) technology which appears to be important in the integration and manufacturing of these satellites. Laser direct-write processing techniques are being applied for rapid prototyping and to specific 3D fabrication steps where conventional microelectronics fabrication techniques fall short. In particular, a laser based technique has been developed that combines the rapid prototyping aspects of direct-write and the low cost/process uniformity aspects of batch processing. This technique has been used to develop various fluidic components and a microthruster subsystem in a photostructurable glass/ceramic material.

Citation Download Citation

Henry Helvajian, Peter D. Fuqua, William W. Hansen, and Siegfried W. Janson "Nanosatellites and MEMS fabrication by laser microprocessing", Proc. SPIE 4088, First International Symposium on Laser Precision Microfabrication, (6 November 2000); https://doi.org/10.1117/12.405723

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