Paper
18 September 2000 Further advances in electron beam recording
Gerald Reynolds, Giles Cartwright
Author Affiliations +
Proceedings Volume 4090, Optical Data Storage 2000; (2000) https://doi.org/10.1117/12.399334
Event: Optical Data Storage, 2000, Whistler, BC, Canada
Abstract
Our development of a production Electron Beam Recorder designed for making masters for optical discs of up to 100 gigabytes capacity is discussed. A second-generation electron beam column for this machine will also be discussed and some recent results of optical discs ranging in capacity from 4.7 GB to 100 GB will be presented.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Gerald Reynolds and Giles Cartwright "Further advances in electron beam recording", Proc. SPIE 4090, Optical Data Storage 2000, (18 September 2000); https://doi.org/10.1117/12.399334
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CITATIONS
Cited by 3 scholarly publications.
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KEYWORDS
Electron beams

Control systems

Atomic force microscopy

Semiconducting wafers

Lenses

Optical discs

Silicon

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