Polymer microfluidics: the technology chain

Holger Becker; Oliver Roetting; Wilfried Roepke; Ulf Heim

doi:10.1117/12.395647

18 August 2000 Polymer microfluidics: the technology chain

Holger Becker, Oliver Roetting, Wilfried Roepke, Ulf Heim

Proceedings Volume 4177, Microfluidic Devices and Systems III; (2000) https://doi.org/10.1117/12.395647
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States

Abstract

In addition to existing microfabrication technologies for the manufacturing of glass or silicon-based microfluidic devices, the increasing demand for polymer based systems requires the establishment of equivalent technologies for the microstructuring of polymers. These technologies can be divided into two fields, the structuring of the polymer itself and the subsequent back-end processes. This article describes a complete technology chain covering these two technology fields.

Citation Download Citation

Holger Becker, Oliver Roetting, Wilfried Roepke, and Ulf Heim "Polymer microfluidics: the technology chain", Proc. SPIE 4177, Microfluidic Devices and Systems III, (18 August 2000); https://doi.org/10.1117/12.395647

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