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Miniaturization of chemical and/or biological analytical systems requires an innovative design and new manufacturing methods. This includes the fabrication of components or structures, the assembly of these parts, and a testing strategy.
The separation of an entire device into a disposable microfluidic system and a multi-use supply unit and housing allows an easy fabrication as well as low cost of operation. A simple, replicated, micro-sized, and disposable unit guarantees the same initial conditions for every analytic cycle, whereas, on the other hand all microfluidic actuators and other key elements can remain outside of the microsystem. In order to drive the implemented passive elements of the microfluidic system by external forces of the base unit, elasticity is a crucial material property. Thus silicone was used as material for the microsystem.
A microfluidic system intended for use in DNA analysis employing the principles of the polymerase chain reaction (PCR) is presented. All functional units have been integrated into a complex module using a CAD-program. The 3D-drawing was converted into several machining layers for a direct laser writing CNC-code. A focussed excimer laser beam was used in order to micromachine the negative channel and reservoir system in a polycarbonate slab employing ablative photo-decomposition. Excimer laser micromachining proofed to be an ideal prototyping technique for this purpose with sufficient lateral and depth control. Its rather low throughput was bypassed with an additional hot embossed intermediate positive polyethylene master which, in turn, replicated produces the negative fluidic system in the target material PDMS (polydimethylsiloxane) as an elastomeric material.
The components of the fluidic systems have been sealed with flat slabs or other microsystem parts of either PDMS or glass. In either case both parts were exposed to a plasma discharge for some seconds in order to clean, oxidize and activate the surface. This enabled an irreversible seal when two oxidized
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