Current status of Nikon's F2 exposure tool development

Naomasa Shiraishi; Soichi Owa; Yasuhiro Ohmura; Takashi Aoki; Yukako Matsumoto; Masato Hatasawa; Takashi Mori; Issei Tanaka

doi:10.1117/12.435631

14 September 2001 Current status of Nikon's F2 exposure tool development

Naomasa Shiraishi, Soichi Owa, Yasuhiro Ohmura, Takashi Aoki, Yukako Matsumoto, Masato Hatasawa, Takashi Mori, Issei Tanaka

Author Affiliations +

Proceedings Volume 4346, Optical Microlithography XIV; (2001) https://doi.org/10.1117/12.435631
Event: 26th Annual International Symposium on Microlithography, 2001, Santa Clara, CA, United States

Abstract

Current status of Nikon's F2 tool development is reported. At first, the required otpical performance of F2 tools will be discussed. Image simulation results show that the required NA for 70 nm is 0.8 or more. Then Nikon's approaches to realize the optics and tools are presented. For the F2 tools, the most important elements are the projection optics and gas purging of the light path. As for the projection optics, conventional lens type may not be applicable for F2 wavelength, and new type catadioptric optics may have to be developed. In this paper, designs of some catadioptric types and some all refractive types are shown and compared. AR-coatings are very important to obtain enough illumination power. New data on Nikon's AR-coatings are presented. For the gas purging, Nikon has already achieved oxygen concentration less than 1 ppm and further improvements are now in development. Results of gas purging are also presented.

Citation Download Citation

Naomasa Shiraishi, Soichi Owa, Yasuhiro Ohmura, Takashi Aoki, Yukako Matsumoto, Masato Hatasawa, Takashi Mori, and Issei Tanaka "Current status of Nikon's F2 exposure tool development", Proc. SPIE 4346, Optical Microlithography XIV, (14 September 2001); https://doi.org/10.1117/12.435631

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available