Test of hot electron emission for the micro mass spectrometer

HyeunJoong Yoon; J. H. Kim; Tae Gyu Park; Sang Sik Yang; K. W. Jung

doi:10.1117/12.425347

5 April 2001 Test of hot electron emission for the micro mass spectrometer

HyeunJoong Yoon, J. H. Kim, Tae Gyu Park, Sang Sik Yang, K. W. Jung

Proceedings Volume 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001; (2001) https://doi.org/10.1117/12.425347
Event: Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, 2001, Cannes-Mandelieu, France

Abstract

This paper presents the principle and fabrication of a novel micro mass spectrometer and emission test of hot electron for ionization. A micro mass spectrometer consists of a micro ion source and a micro ion separator. The micro ion source consists of a hot filament and grid electrodes. Electrons emitted by a hot filament are to ionize some sample molecules. The ions are accelerated to an ion detector by an electric field. Mass can be analyzed by using the time of fight depending on the mass charge ratio. The current of hot electron emission from the hot filament is measured for various input voltages.

Citation Download Citation

HyeunJoong Yoon, J. H. Kim, Tae Gyu Park, Sang Sik Yang, and K. W. Jung "Test of hot electron emission for the micro mass spectrometer", Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); https://doi.org/10.1117/12.425347

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