Simulations of a microvalve and a micropump

Yuan Xu; Wen On Choong; Francis E.H. Tay; Xuanxiong Zhang; Yen-Peng Kong; Haiqing Gong

doi:10.1117/12.443070

28 September 2001 Simulations of a microvalve and a micropump

Yuan Xu, Wen On Choong, Francis E.H. Tay, Xuanxiong Zhang, Yen-Peng Kong, Haiqing Gong

Proceedings Volume 4560, Microfluidics and BioMEMS; (2001) https://doi.org/10.1117/12.443070
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States

Abstract

A methodology for the simulation of a reciprocating displacement micro-pump is presented. First a check valve model was analyzed using coupled FEM to obtain the characteristics relationship between flow rate and the pressure as well as the minimum valve opening pressure. Then a model for the micro-pump actuator driven by PZT disks is proposed and simulated. The pump model takes into account the effects of chamber pressure and geometrical parameters. The maximum downward deflection of the actuating membrane is taken as the target parameter to analyze. It was found that the maximum membrane deflection could reach over 10micrometers microns, much larger than the radial displacement. This 'displacement amplification' is the underlying working principle of this kind of micro-pump. Quantitative analyses of the effects of various factors on the deflection are conducted. It is found that the thickness of the membrane has the biggest influence on the deflection. For each membrane thickness, there exists an op[t9kum PZT disk thickness that gives the maximum deflection at a particular electric field. Other factors with less influence on the deflection are also investigated. An optimum set of design parameters for the micro-pump is obtained form the analyses.

Citation Download Citation

Yuan Xu, Wen On Choong, Francis E.H. Tay, Xuanxiong Zhang, Yen-Peng Kong, and Haiqing Gong "Simulations of a microvalve and a micropump", Proc. SPIE 4560, Microfluidics and BioMEMS, (28 September 2001); https://doi.org/10.1117/12.443070

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