Alternating phase shifting mask implementation to 0.1-um logic gates

Chung-Hsing Chang; San-De Tzu; Chen-Hao Hsieh; Chang-Min Dai; Burn Jeng Lin; Chia-Hui Lin; Hua-Yu Liu

doi:10.1117/12.458313

11 March 2002 Alternating phase shifting mask implementation to 0.1-μm logic gates

Chung-Hsing Chang, San-De Tzu, Chen-Hao Hsieh, Chang-Min Dai, Burn Jeng Lin, Chia-Hui Lin, Hua-Yu Liu

Proceedings Volume 4562, 21st Annual BACUS Symposium on Photomask Technology; (2002) https://doi.org/10.1117/12.458313
Event: Photomask 2001, 2001, Monterey, CA, United States

Abstract

Double exposure alternating phase-shift mask (alt-PSM) technology with ArF exposure was used in the 0.1 micrometers technology node for patterning logic devices with polysilicon gates ranging from 110nm to 60nm. A dual-trench mask fabrication process was developed in-house at TSMC, and controls for phase accuracy and intensity balance were established. Optical proximity correction (OPC) was performed on both binary masks and alt-PSM. Interactions between the binary and the PSM exposures were taking in to accounted during the correction. Using Model based OPC and a single calibrated resist model, the critical dimensions (CD) linearity can be ideally matched to the designed CD for duty ratio >= 1:1.5 for polygate logic product has been implemented exhibiting an enlarged DOF, good resist line edge roughness (LER), a d CD uniformity.

Citation Download Citation

Chung-Hsing Chang, San-De Tzu, Chen-Hao Hsieh, Chang-Min Dai, Burn Jeng Lin, Chia-Hui Lin, and Hua-Yu Liu "Alternating phase shifting mask implementation to 0.1-μm logic gates", Proc. SPIE 4562, 21st Annual BACUS Symposium on Photomask Technology, (11 March 2002); https://doi.org/10.1117/12.458313

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available