Tip shape effects in scanning probe metrology

Rand Cottle

doi:10.1117/12.458297

11 March 2002 Tip shape effects in scanning probe metrology

Rand Cottle

Proceedings Volume 4562, 21st Annual BACUS Symposium on Photomask Technology; (2002) https://doi.org/10.1117/12.458297
Event: Photomask 2001, 2001, Monterey, CA, United States

Abstract

Recently, interest in the use of scanning probe microscopes (SPM) for metrology applications has grown. SPM can provide detailed topographical maps of reticles and wafers from which much useful data can be extracted. For example, CD measurements very near the bottom of sidewalls can be determined. Sidewall angles can be measured non-destructively. Micro-trenching (micro-loading) in etched quartz features on APSM can be characterized, and quartz bumps can be volume mapped for accurate dose control on FIB repair tools. The main issue complicating the use of SPM for metrology is the effect of tip shape and tip wear on the measurement data. For example, features with nearly vertical surfaces, like sidewalls, can't be measured accurately with conical tips because SPM scans will actually measure the sidewall of the tip and not the feature. This study will qualitatively address the issues associated with tip shape effects and discuss methods being employed to reduce or eliminate them.

Citation Download Citation

Rand Cottle "Tip shape effects in scanning probe metrology", Proc. SPIE 4562, 21st Annual BACUS Symposium on Photomask Technology, (11 March 2002); https://doi.org/10.1117/12.458297

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