MEMS-based sensor system for environmental monitoring

James T. Daly; Edward A. Johnson; Nicholas Moelders; Mark P. McNeal; Martin U. Pralle; Anton C. Greenwald; William Ho; Irina Puscasu; Thomas George; Daniel S. Choi

doi:10.1117/12.456941

22 February 2002 MEMS-based sensor system for environmental monitoring

James T. Daly, Edward A. Johnson, Nicholas Moelders, Mark P. McNeal, Martin U. Pralle, Anton C. Greenwald, William Ho, Irina Puscasu, Thomas George, Daniel S. Choi

Author Affiliations +

Proceedings Volume 4576, Advanced Environmental Sensing Technology II; (2002) https://doi.org/10.1117/12.456941
Event: Environmental and Industrial Sensing, 2001, Boston, MA, United States

Abstract

A new IR-based sensor technology is introduced for environmental monitoring of industrial pollutants (CO₂, CO, NO_x, etc.). The design concept exploits Si-based, thermally isolated suspended bridge structures. These devices, which function as both IR emitter and detector, are fabricated using MEMS-based processing methods. Photonic bandgap (PBG) modified surfaces enable narrow band IR emission for high chemical selectivity and sensitivity. Spectral tuning is accomplished by controlling symmetry and lattice spacing of the PBG structures. IR spectroscopic studies were used to characterize transmission, absorption and emission spectra in the 2 to 20 micrometers wavelength range. Device characterization studies measured drive and emission power, temperature uniformity, and black body detectivity. Gas detection was achieved using non-dispersive infrared (NDIR) spectroscopic techniques, whereby target gas species and concentrations were determined from comparison to referenced spectra. A sensor system employing the emitter/detector sensor-chip with gas cell and reflective optics is demonstrated and CO₂ gas sensitivity limits are reported. A multi-channel microsensor-array is proposed for multigas (e.g., CO₂, CO, and NO_x, etc.) detection.

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James T. Daly, Edward A. Johnson, Nicholas Moelders, Mark P. McNeal, Martin U. Pralle, Anton C. Greenwald, William Ho, Irina Puscasu, Thomas George, and Daniel S. Choi "MEMS-based sensor system for environmental monitoring", Proc. SPIE 4576, Advanced Environmental Sensing Technology II, (22 February 2002); https://doi.org/10.1117/12.456941

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