Copper microcoil arrays for the actuation of optical matrix microswitches

Lionel Houlet; Gilbert Reyne; Tetsuhiko Iizuka; Tarik Bourouina; Elizabeth-Dufour Gergam; Hiroyuki Fujita

doi:10.1117/12.448997

21 November 2001 Copper microcoil arrays for the actuation of optical matrix microswitches

Lionel Houlet, Gilbert Reyne, Tetsuhiko Iizuka, Tarik Bourouina, Elizabeth-Dufour Gergam, Hiroyuki Fujita

Proceedings Volume 4592, Device and Process Technologies for MEMS and Microelectronics II; (2001) https://doi.org/10.1117/12.448997
Event: International Symposium on Microelectronics and MEMS, 2001, Adelaide, Australia

Abstract

Copper micro-coil arrays have been designed and realized by electroplating for the actuation of arrays of optical matrix micro-switches. The good operation of the micro-switches needs large force that is well fulfilled by the electromagnetic actuation of copper micro-coils. The electromagnetic behavior of the actuator has been examined using the simulator FLUX2D^TM and an optimized configuration of ferromagnetic materials was determined. Arrays of micro-coils with high aspect ratio have been achieved with the use of SU8 resin mould. The diameters of micro-coils range from 0.5 millimeters to 4 millimeters with thickness of about 30 micrometers and few tens of turns. Electric measurements have been done in order to characterize the micro-coils.

Citation Download Citation

Lionel Houlet, Gilbert Reyne, Tetsuhiko Iizuka, Tarik Bourouina, Elizabeth-Dufour Gergam, and Hiroyuki Fujita "Copper microcoil arrays for the actuation of optical matrix microswitches", Proc. SPIE 4592, Device and Process Technologies for MEMS and Microelectronics II, (21 November 2001); https://doi.org/10.1117/12.448997

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