Ultrawide continuously tunable 1.55-um vertical-air-cavity filters and VCSELs based on micromachined electrostatic actuation

Hartmut Hillmer; Juergen Daleiden; Cornelia Prott; Friedhard Roemer; Amer Tarraf; Soeren Irmer; Ventzeslav Rangelov; S. Schueler; Martin Strassner

doi:10.1117/12.470511

12 June 2002 Ultrawide continuously tunable 1.55-μm vertical-air-cavity filters and VCSELs based on micromachined electrostatic actuation

Hartmut Hillmer, Juergen Daleiden, Cornelia Prott, Friedhard Roemer, Amer Tarraf, Soeren Irmer, Ventzeslav Rangelov, S. Schueler, Martin Strassner

Author Affiliations +

Proceedings Volume 4646, Physics and Simulation of Optoelectronic Devices X; (2002) https://doi.org/10.1117/12.470511
Event: Symposium on Integrated Optoelectronic Devices, 2002, San Jose, California, United States

Abstract

We study 1.55micrometers filter and VCSEL devices capable of wide and continuous tuning based on a single control parameter. Ultra-high reflective DBR mirrors are realized with a low number of DBR periods using high refractive index contrast: (I) (Delta) n=2.17 for InP/airgap DBR's (3.5 periods) and (II) (Delta) n=0.5 for Si₃N₄/SiO₂ DBR's (12 periods) with a polymer sacrificial layer to implement the air-cavity. Corresponding fabrication technologies are presented in detail. In both cases spectral tuning (>100nm, theoretically) is obtained by micomachined actuation of the included air-cavity. Large stopband widths and very large tuning efficiencies are obtained by model calculations. For VCSEL's a trade-off between lasing efficiency and tuning efficiency is obtained. Experimental results show very good optical properties: high mirror reflectance and clear single-line filter transmission. The first tunable dielectric filter based on polymer sacrificial layers is presented: (Delta) (lambda) /(Delta) U= -7nm/V at 1mA. The potential of the airgap concept: the filter transmission or the laser emission wavelength can be continuously tuned over more than 100nm, thus, the whole spectral gain profile can be addressed by a single control parameter.

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Hartmut Hillmer, Juergen Daleiden, Cornelia Prott, Friedhard Roemer, Amer Tarraf, Soeren Irmer, Ventzeslav Rangelov, S. Schueler, and Martin Strassner "Ultrawide continuously tunable 1.55-μm vertical-air-cavity filters and VCSELs based on micromachined electrostatic actuation", Proc. SPIE 4646, Physics and Simulation of Optoelectronic Devices X, (12 June 2002); https://doi.org/10.1117/12.470511

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