Paper
15 November 2002 Recent advances in optical MEMS devices and systems
Pamela Rae Patterson, Dooyoung Hah, Mark M. C. Lee, Jui Che Tsai, Ming C. Wu
Author Affiliations +
Abstract
We have developed novel optical micro-electro-mechanical systems, (MEMS) and nano-electro-mechanical, (NEMS) optical components for applications including imaging, switching, and optical integrated circuits. This paper provides an overview of current optical MEMS/NEMS research projects in our integrated photonics laboratory at UCLA. Three optical MEMS/NEMS devices: a large, 1 mm diameter, scanning micromirror for imaging applications, an analog micromirror array for network switching applications, and a nanoscale photonic crystal switch for integrated photonic circuit applications will be described.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Pamela Rae Patterson, Dooyoung Hah, Mark M. C. Lee, Jui Che Tsai, and Ming C. Wu "Recent advances in optical MEMS devices and systems", Proc. SPIE 4788, Photonic Devices and Algorithms for Computing IV, (15 November 2002); https://doi.org/10.1117/12.453712
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KEYWORDS
Micromirrors

Mirrors

Photonic crystals

Microelectromechanical systems

Microopto electromechanical systems

Silicon

Switches

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