Critical Dimension Measurement In The Scanning Electron Microscope

Michael T. Postek

doi:10.1117/12.943055

15 October 1984 Critical Dimension Measurement In The Scanning Electron Microscope

Michael T. Postek

Proceedings Volume 0480, Integrated Circuit Metrology II; (1984) https://doi.org/10.1117/12.943055
Event: 1984 Technical Symposium East, 1984, Arlington, United States

Abstract

The progression of Semiconductor device sizes into the submicron region requires inspection and measurement techniques with higher resolution than that presently available with the optical microscope. The increasing need of the semiconductor industry for accurate dimensional measurement and inspection in the submicron range for LSI, VLSI and VSHIC circuitry has led it to the higher resolution and depth of field afforded by the SEM In-process inspection and critical dimension measurement of these devices has been facilitated due to recent developments and applications which reduce,minimize and possibly eliminate sample damage and contamination. This paper will present one method for the acquisition of critical dimension measurements using video profile analysis and will discuss some of the factors that affect these profiles.

Citation Download Citation

Michael T. Postek "Critical Dimension Measurement In The Scanning Electron Microscope", Proc. SPIE 0480, Integrated Circuit Metrology II, (15 October 1984); https://doi.org/10.1117/12.943055

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available