Simultaneous determination of thickness and optical constants of polymer thin film from oblique transmittance

Bum Ku Rhee; Changsoo Jung

doi:10.1117/12.531201

19 November 2003 Simultaneous determination of thickness and optical constants of polymer thin film from oblique transmittance

Bum Ku Rhee, Changsoo Jung

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Proceedings Volume 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life; (2003) https://doi.org/10.1117/12.531201
Event: 19th Congress of the International Commission for Optics: Optics for the Quality of Life, 2002, Florence, Italy

Abstract

We present a novel method for determining both the thickness and optical constants of weakly absorbing thin film on nearly transparent substrate through analysis of transmittances measured at various incident angles with the coherent lights. We demonstrate this method for polymer thin film. The refractive indices and extinction coefficients of poly (tetracyanoethylene-carbazole) at two different wavelengths of 1064nm and 532 nm were determined for the first time to our knowledge. It is found that a thickness of a few hundred nanometers can be easily measured and this method offers simplicity as well as in situ measurement.

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Bum Ku Rhee and Changsoo Jung "Simultaneous determination of thickness and optical constants of polymer thin film from oblique transmittance", Proc. SPIE 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life, (19 November 2003); https://doi.org/10.1117/12.531201

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KEYWORDS

Polymer thin films

Refractive index

Transmittance

Glasses

Thin films

Polymers

In situ metrology

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