Influence of multilayers on the optical performance of extreme-ultraviolet projection systems

Matthieu Bal; Florian Bociort; Joseph J. M. Braat

doi:10.1117/12.486478

23 December 2002 The influence of multilayers on the optical performance of extreme ultraviolet projection systems

Matthieu Bal, Florian Bociort, Joseph J. M. Braat

Proceedings Volume 4832, International Optical Design Conference 2002; (2002) https://doi.org/10.1117/12.486478
Event: International Optical Design Conference 2002, 2002, Tucson, AZ, United States

Abstract

Extreme UltraViolet (EUV) projection systems consist of reflective optics, as the 13.4 nm illuminating radiation is highly absorbed in all materials. The reflectors are multilayers, which typically consist of alternating layers of molybdenum and silicon. The multilayers entail important consequences for the imaging properties, such as resolution, depth of focus and tolerances. To incorporate the influence of multilayers in optical design software an approach using the effective reflective depth is proposed. A new method to calculate the spatially varying optimum thickness of multilayers ('grading') is presented.

Citation Download Citation

Matthieu Bal, Florian Bociort, and Joseph J. M. Braat "The influence of multilayers on the optical performance of extreme ultraviolet projection systems", Proc. SPIE 4832, International Optical Design Conference 2002, (23 December 2002); https://doi.org/10.1117/12.486478

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