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17 February 2003 Automated alignment for free-space optical systems based on micro-optical-electro-mechanical systems
John A. Neff, Jianglong Zhang, Adisorn Tuantranont, Yijing Fu, Yung-Cheng Lee, Victor M. Bright
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Proceedings Volume 4833, Applications of Photonic Technology 5; (2003) https://doi.org/10.1117/12.474871
Event: Applications of Photonic Technology 5, 2002, Quebec City, Canada
Abstract
The emerging technology of micro-optical-electro-mechanical systems (MOEMS) offer promise for automating the alignment of free-space optical systems, especially intra-computer optical interconnects. MOEMS-based microlenses and micromirrors have been fabricated for the purpose of providing initial system alignment and dynamic alignment.
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John A. Neff, Jianglong Zhang, Adisorn Tuantranont, Yijing Fu, Yung-Cheng Lee, and Victor M. Bright "Automated alignment for free-space optical systems based on micro-optical-electro-mechanical systems", Proc. SPIE 4833, Applications of Photonic Technology 5, (17 February 2003); https://doi.org/10.1117/12.474871
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KEYWORDS
Micromirrors
Optical alignment
Electrodes
Microlens
Mirrors
Microelectromechanical systems
Microopto electromechanical systems
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