Effective distributed architecture for OPC and RET applications

Robert M. Lugg; Mathias Boman; James Burdorf; Michael L. Rieger

doi:10.1117/12.471300

27 December 2002 An Effective Distributed Architecture for OPC & RET Applications

Robert M. Lugg, Mathias Boman, James Burdorf, Michael L. Rieger

Proceedings Volume 4889, 22nd Annual BACUS Symposium on Photomask Technology; (2002) https://doi.org/10.1117/12.471300
Event: Photomask Technology 2002, 2002, Monterey, CA, United States

Abstract

The computational power needed to generate mask layouts for OPC and resolution enhancement techniques increases exponentially with process node. Rapidly growing design complexity is compounded with the more aggressive methods now required for smaller feature sizes. Layers once considered non-critical now routinely receive correction. While some improvement in code efficiency can be expected, algorithms are maturing to the point where improvements will likely not keep pace with the computational need. To maintain required processing cycle times massively parallel processing methods must be employed. In this paper we discuss loosely-coupled distributed computing architectures applied to OPC/RET layout synthesis. The degree to which an application is scalable depends on how well the problem can be divided into independent sets of data. Furthermore, data must also be partitioned into reasonably sized blocks so that memory requirements per processor can be bounded. Communication overhead, I/O overhead and serial processeses all degrade scalability, and may increase overall storage requirements. In this paper we analyze behavior of distributed processing architectures with large numbers of processors, and we present performance data on an existing massively parallel system.

Citation Download Citation

Robert M. Lugg, Mathias Boman, James Burdorf, and Michael L. Rieger "An Effective Distributed Architecture for OPC & RET Applications", Proc. SPIE 4889, 22nd Annual BACUS Symposium on Photomask Technology, (27 December 2002); https://doi.org/10.1117/12.471300

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