Laser metallization for microelectronics and bio-applications

Lucien Diego Laude; Konstantin Kolev; Claudio Dicara; Catherine Dupas-Bruzek

doi:10.1117/12.483853

17 October 2003 Laser metallization for microelectronics and bio-applications

Lucien Diego Laude, Konstantin Kolev, Claudio Dicara, Catherine Dupas-Bruzek

Proceedings Volume 4977, Photon Processing in Microelectronics and Photonics II; (2003) https://doi.org/10.1117/12.483853
Event: High-Power Lasers and Applications, 2003, San Jose, CA, United States

Abstract

Excimer lasers were demonstrated to be effective tools in (1) engraving ceramics and polymers, (2) changing irreversibly the surface chemistry of the irradiated material, and (3) restricting these effects to specific areas of interest. In so doing, excimer laser irradiation does open new routes to functionalizing the surface of such diverse and difficult materials, allowing them to be utilized in given applications. In this paper, it is demonstrated how the above three potentialities of excimer laser surface irradiation may be put into practice in producing application-specific metallic tracks onto either sintered ceramics or polymeric materials. To this end, the accent is deliberately put here on the photochemical aspect of this irradiation process. The latter is responsible for modifying the surface stoichiometry and/or structure of irradiated ceramics and silicone rubbers and also, of some of the solid additives which combine to polymers to form so-called thermoplastics. An important consequence of this changing surface chemistry resides in the possibility for decorating the processed surfaces with metal via an electro less technique, thus establishing the ground for a novel metallization process that is presented and examplified.

Citation Download Citation

Lucien Diego Laude, Konstantin Kolev, Claudio Dicara, and Catherine Dupas-Bruzek "Laser metallization for microelectronics and bio-applications", Proc. SPIE 4977, Photon Processing in Microelectronics and Photonics II, (17 October 2003); https://doi.org/10.1117/12.483853

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