Fabrication of a porous membrane for gas precombustion

Joerg Stuermann; Andre Boedecker; Alexandra Splinter; Wolfgang Benecke

doi:10.1117/12.473377

15 January 2003 Fabrication of a porous membrane for the gas pre-combustion

Joerg Stuermann, Andre Boedecker, Alexandra Splinter, Wolfgang Benecke

Proceedings Volume 4979, Micromachining and Microfabrication Process Technology VIII; (2003) https://doi.org/10.1117/12.473377
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

This paper presents a micro reactor, which consists of a permeable membrane fabricated by silicon micro machining technology. The fabrication process is a combination of anisotropic silicon etching (wet etching and dry etching) and porous silicon technology. To avoid a reaction chamber with a high dead volume, we have realised a permeable membrane in conjunction with porous silicon to achieve a high surface to volume ratio, impregnated with palladium or platinum. For the activation of the heterogeneous reaction on the surface of the catalytic material a heating element around the permeable membrane, which is thermally decoupled with a porous silicon well of the surrounding bulk material is realised. The gas flows through the membrane and reacts during the passing time. The reaction time for gases depends on the membrane thickness and the active surface of the porous silicon. The application is the integration into a gas analysing system combined with a gas sensor array, a gas chromatographic system, microvalves, and calibration units mounted all on a pneumatic motherboard.

Citation Download Citation

Joerg Stuermann, Andre Boedecker, Alexandra Splinter, and Wolfgang Benecke "Fabrication of a porous membrane for the gas pre-combustion", Proc. SPIE 4979, Micromachining and Microfabrication Process Technology VIII, (15 January 2003); https://doi.org/10.1117/12.473377

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KEYWORDS

Silicon

Gas sensors

Palladium

Chemical elements

Etching

Platinum

Wet etching

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