Failure analysis of a multi-degree-of-freedom spatial microstage

Jeremy A. Walraven; Bernhard Jokiel Jr.

doi:10.1117/12.478207

16 January 2003 Failure analysis of a multi-degree-of-freedom spatial microstage

Jeremy A. Walraven, Bernhard Jokiel Jr.

Proceedings Volume 4980, Reliability, Testing, and Characterization of MEMS/MOEMS II; (2003) https://doi.org/10.1117/12.478207
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

Spatial microstages are microfabricated controlled platforms that can be popped out of the fabrication plane and are free to move in three-dimensional (3D) space. Spatial microstages have shown promise for use in MOEMS for adaptive optics, automatic focusing systems, fiber optic alignment/precision positioning, real time optical alignment, interconnects, and a host of other applications. These devices were designed and fabricated to position a controllable stage in 3D space from microassembly and microfabrication. Microstages can be designed and fabricated to move in plane (x, y) and out of plane (z). Advanced microstages are designed to move in plane, out-of-plane, rotate, and tilt about x, y, and z. Design and fabrication of the rotational and tilt components are critical in performing the three-dimensional pop up and tilting action needed for precise micropositioning. The device used for analysis contains linear racks driven by electrostatic actuators. The actuators are attached to a microstage through a hinge component with revolving, rotating, and tilting joints. The actuators allow x, y, and z positioning while the hinge allows rotational motion along the stage. Failure analysis of the Sandia fabricated microstage was performed on released and as fabricated microstages. Failure analysis of these devices revealed design and fabrication irregularities along the revolving components of the hinge. This paper will discuss the design and functionality of the microstage, failure analysis activities and failure mechanisms found in polysilicon fabricated microstages, corrective actions and design improvements.

Citation Download Citation

Jeremy A. Walraven and Bernhard Jokiel Jr. "Failure analysis of a multi-degree-of-freedom spatial microstage", Proc. SPIE 4980, Reliability, Testing, and Characterization of MEMS/MOEMS II, (16 January 2003); https://doi.org/10.1117/12.478207

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available