Ambient effects on the laser durability of 157-nm optical coatings

Vladimir Liberman; Mordechai Rothschild; Stephen T. Palmacci; Nikolay N. Efremow; Jan H. C. Sedlacek; Andrew Grenville

doi:10.1117/12.497525

26 June 2003 Ambient effects on the laser durability of 157-nm optical coatings

Vladimir Liberman, Mordechai Rothschild, Stephen T. Palmacci, Nikolay N. Efremow, Jan H. C. Sedlacek, Andrew Grenville

Proceedings Volume 5040, Optical Microlithography XVI; (2003) https://doi.org/10.1117/12.497525
Event: Microlithography 2003, 2003, Santa Clara, California, United States

Abstract

We present results of the durability of antireflectance (AR) coatings under laser irradiation with emphasis on the interplay between coating materials and ambient. We find that introducing ppm-levels of water has a dramatic impact on the performance of certain coatings. In particular, no significant degradation of a coating was observed for up to 1MJ/cm² dose in the presence of ~20 ppm H₂O, whereas linear transmission drop of several percent was observed when irradiating a coating of similar design in <0.1 ppm H₂O but under 1.5 ppm O₂. Cycling water concentration on and off leads a corresponding cycling of transmission of the coatings. Adding water vapor to the ambient has a much greater benefit to coating durability than adding corresponding amounts of gas phase oxygen. In a series of experiments involving the same coating stack with different degrees of porosity of the outer layer, moisture was found to have the greatest impact on the most porous coating.

Citation Download Citation

Vladimir Liberman, Mordechai Rothschild, Stephen T. Palmacci, Nikolay N. Efremow, Jan H. C. Sedlacek, and Andrew Grenville "Ambient effects on the laser durability of 157-nm optical coatings", Proc. SPIE 5040, Optical Microlithography XVI, (26 June 2003); https://doi.org/10.1117/12.497525

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