Measurement of the refractive index and thermo-optic coefficient of water near 193 nm

John H. Burnett; Simon Kaplan

doi:10.1117/12.504601

26 June 2003 Measurement of the refractive index and thermo-optic coefficient of water near 193 nm

John H. Burnett, Simon Kaplan

Proceedings Volume 5040, Optical Microlithography XVI; (2003) https://doi.org/10.1117/12.504601
Event: Microlithography 2003, 2003, Santa Clara, California, United States

Abstract

We discuss our approaches for measuring the absolute index (n), and its dependencies on wavelength (dn/dλ) and temperature (dn/dT), of high-purity water for wavelengths near 193 nm, using the minimum deviation prism method and an interferometric technique. We present preliminary results for these quantities measured by the minimum deviation method.

Citation Download Citation

John H. Burnett and Simon Kaplan "Measurement of the refractive index and thermo-optic coefficient of water near 193 nm", Proc. SPIE 5040, Optical Microlithography XVI, (26 June 2003); https://doi.org/10.1117/12.504601

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