MEMS-fabricated ICPF microactuators for biological manipulation

Wenli Zhou; Wen Jung Li; John D. Mai

doi:10.1117/12.484387

28 July 2003 MEMS-fabricated ICPF actuators for biological manipulation

Wenli Zhou, Wen Jung Li, John D. Mai

Proceedings Volume 5051, Smart Structures and Materials 2003: Electroactive Polymer Actuators and Devices (EAPAD); (2003) https://doi.org/10.1117/12.484387
Event: Smart Structures and Materials, 2003, San Diego, California, United States

Abstract

Ionic Conducting Polymer Film (ICPF) micro grippers with multi-finger configurations were developed using spin-on Nafion and photolithographic technology. A commercial solution from Dupont Co. (Nafion SE-5012) was used to prepare ~0.2 μm thick ionic conducting polymer film. Micro cantilever structures were fabricated which composed of Au/Nafion/Au film layers. Grippers with 2-finger and 4-finger configurations were successfully developed. We have proved that the 2-fingered grippers can be actuated in water at ~5V DC voltages. The smallest 4-fingered grippers fabricated were 30 μm wide, 300 μm long and 0.4 μm thick for each finger. In addition, another interesting actuation behavior of the micro actuator was observed during fabrication. The actuators would curl up whenever they came in contact with water during the sacrificial release process. The curling process reversed instantaneously when the actuators are immersed in acid. We suggest that this phenomenon is probably due to the different volume expansions of Nafion in different medium. Besides, the current-voltage property was measured. We are further studying the consistency of their behaviors to modify the design and fabrication process for potential use in biological manipulations.

Citation Download Citation

Wenli Zhou, Wen Jung Li, and John D. Mai "MEMS-fabricated ICPF actuators for biological manipulation", Proc. SPIE 5051, Smart Structures and Materials 2003: Electroactive Polymer Actuators and Devices (EAPAD), (28 July 2003); https://doi.org/10.1117/12.484387

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