Microvalve for SMA-based CHAD

Dong Gun Lee; Quanfang Chen; Daniel D. Shin; Gregory Paul Carman

doi:10.1117/12.483593

22 July 2003 Microvalve for SMA-based CHAD

Dong Gun Lee, Quanfang Chen, Daniel D. Shin, Gregory Paul Carman

Proceedings Volume 5055, Smart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology; (2003) https://doi.org/10.1117/12.483593
Event: Smart Structures and Materials, 2003, San Diego, California, United States

Abstract

This paper describes the development of a micro-machined passive check valve for an SMA-based compact hybrid actuator device (CHAD). The overall diameter of the valve is 12 mm and the thickness is 1 mm. The structure houses an array of 56 micro check valves. Each micro valve has a 250 μm diameter orifice covered by 10 mm thick nickel flap. Stoppers on each micro valves limit the displacement of the flaps during an opening. This design allows the Ni flaps to withstand high-pressure gradient created by the actuator while achieving high flow rate. A finite element analysis is used to characterize the static and dynamic behaviors of the valve flap for the prediction on flow rate. The prediction is found to be in good agreement with the experiment on static flow rate. The test results indicate that the flaps are able to withstand pressure difference of 0.28 MPa while achieving flow rate of 20 cc/sec. The valve also has low cracking pressure and reverse leakage.

Citation Download Citation

Dong Gun Lee, Quanfang Chen, Daniel D. Shin, and Gregory Paul Carman "Microvalve for SMA-based CHAD", Proc. SPIE 5055, Smart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (22 July 2003); https://doi.org/10.1117/12.483593

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