Paper
6 August 2003 High-resolution phase-only spatial light modulators with submillisecond response
Steven A. Serati, Xiaowei Xia, Owais Mughal, Anna Linnenberger
Author Affiliations +
Abstract
Improvements in silicon foundry processes have made possible high-resolution, light-efficient backplanes capable of driving electro-optic modulators with higher voltage signals. The higher voltage provides the excitation to achieve sub-millisecond response times with a wave of phase modulation when used with dual-frequency nematic liquid crystals. By combining dual-frequency phase modulators with high-voltage silicon backplanes, compact spatial light modulators become available for applications that need fast, high-throughput modulators such as optical signal processing, adaptive wavefront correction, optical signal routing or beamsteering, and active diffractive optics.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Steven A. Serati, Xiaowei Xia, Owais Mughal, and Anna Linnenberger "High-resolution phase-only spatial light modulators with submillisecond response", Proc. SPIE 5106, Optical Pattern Recognition XIV, (6 August 2003); https://doi.org/10.1117/12.488311
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CITATIONS
Cited by 26 scholarly publications and 1 patent.
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KEYWORDS
Spatial light modulators

Modulators

Liquid crystals

Liquid crystal on silicon

Modulation

Phase shift keying

Chemical mechanical planarization

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