Low-loss wideband filters and resonator filters using high-temperature stable high-electromechanical-coupling acoustic surface wave substrates using microfabrication technology

Kazuhiko Yamanouchi; Toru Ishii

doi:10.1117/12.501307

24 April 2003 Low-loss wide band filters and resonator filters using high-temperature stable high-electromechanical coupling surface acoustic wave substrates using micro-fabrication technology

Kazuhiko Yamanouchi, Toru Ishii

Author Affiliations +

Proceedings Volume 5116, Smart Sensors, Actuators, and MEMS; (2003) https://doi.org/10.1117/12.501307
Event: Microtechnologies for the New Millennium 2003, 2003, Maspalomas, Gran Canaria, Canary Islands, Spain

Abstract

SiO₂/rotated Y-cut, X-propagating LiNbO3 leaky SAW substrates with a large k²(over 0.2) and zero TCF at a small thickness of SiO₂ of H/λ=0.2 (H: SiO₂ film thickness, λ: (SAW wave-length) compared to those of other substrates and zero propagation attenuation in the case of metalized surface. Theoretical and experimental results for low-loss filters, resonators and resonator filters are described. The low-loss filters using (FEUDT) showed an insertion loss of below 1dB at a center frequency of 400MHz and bandwidth of 20MHz using micro-fabrication technology. Also, the resonator showed wide-band characteristics and resonator filters showed a bandwidth of 89MHz at a center frequency of 500MHz.

Citation Download Citation

Kazuhiko Yamanouchi and Toru Ishii "Low-loss wide band filters and resonator filters using high-temperature stable high-electromechanical coupling surface acoustic wave substrates using micro-fabrication technology", Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); https://doi.org/10.1117/12.501307

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