Optical components and actuators for integrated near-field optical data storage

Kazuhiro Hane; Yoshiaki Kanamori; Minoru Sasaki; Jong Hyeong Song

doi:10.1117/12.498885

24 April 2003 Optical components and actuators for integrated near-field optical data storage

Kazuhiro Hane, Yoshiaki Kanamori, Minoru Sasaki, Jong Hyeong Song

Proceedings Volume 5116, Smart Sensors, Actuators, and MEMS; (2003) https://doi.org/10.1117/12.498885
Event: Microtechnologies for the New Millennium 2003, 2003, Maspalomas, Gran Canaria, Canary Islands, Spain

Abstract

Data-storage using near-field optical microscopy is a promising technology for the breakthrough of high-density optical disk memory since wavelength limit of conventional lens-optics is not applied. We have proposed a MEMS for the near-field optical data storage, which consists of integrated optical micro-probes and a micro media-translation-table. Three-dimensional lithography based on the bulk micromachining using resist spray coater is applied to the integration of waveguide, micro-pinhole tip, cantilever, and photodiode for the MEMS probes. The media-translation-table consists of the inverted scratch drive actuators (inverted SDAs) fabricated by surface micromachining.

Citation Download Citation

Kazuhiro Hane, Yoshiaki Kanamori, Minoru Sasaki, and Jong Hyeong Song "Optical components and actuators for integrated near-field optical data storage", Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); https://doi.org/10.1117/12.498885

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