Polymeric mechanical sensors with integrated readout in a microfluidic system

Montserrat Calleja; Peter A Rasmussen; Alicia Johansson; Anja Boisen

doi:10.1117/12.498934

24 April 2003 Polymeric mechanical sensors with piezoresistive readout integrated in a microfluidic system

Montserrat Calleja, Peter A Rasmussen, Alicia Johansson, Anja Boisen

Proceedings Volume 5116, Smart Sensors, Actuators, and MEMS; (2003) https://doi.org/10.1117/12.498934
Event: Microtechnologies for the New Millennium 2003, 2003, Maspalomas, Gran Canaria, Canary Islands, Spain

Abstract

Micrometer sized cantilevers can be used as highly sensitive bio/chemical sensors and are usually fabricated in silicon. Here, we demonstrate the integration of an array of polymeric cantilever sensors into a microfluidic system designed for bio/chemical detection. The cantilever-sensors as well as the microfluidic system are fabricated in the polymer SU-8. Gold strain gauge resistors are incorporated in the cantilevers in order to make them sensitive to changes in surface stress. The cantilever device is fabricated as two separate parts, which are subsequently bonded together using SU-8 as glue. The sensitivity and noise response of the polymeric cantilevers are measured. The measured noise level indicates that the device is suitable for molecular recognition measurements.

Citation Download Citation

Montserrat Calleja, Peter A Rasmussen, Alicia Johansson, and Anja Boisen "Polymeric mechanical sensors with piezoresistive readout integrated in a microfluidic system", Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); https://doi.org/10.1117/12.498934

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