Ultrathin-membrane EPL masks

J. Greschner; T. Bayer; S. Kalt; H. Weiss; Phillip L. Reu; Roxann L. Engelstad; Obert R. Wood II; Carey M. Thiel; Michael S. Gordon; Rajinder S. Dhaliwal; Christopher F. Robinson; Hans C. Pfeiffer

doi:10.1117/12.515090

28 May 2003 Ultrathin-membrane EPL masks

J. Greschner, T. Bayer, S. Kalt, H. Weiss, Phillip L. Reu, Roxann L. Engelstad, Obert R. Wood II, Carey M. Thiel, Michael S. Gordon, Rajinder S. Dhaliwal, Christopher F. Robinson, Hans C. Pfeiffer

Author Affiliations +

Proceedings Volume 5148, 19th European Conference on Mask Technology for Integrated Circuits and Microcomponents; (2003) https://doi.org/10.1117/12.515090
Event: 19th European Conference on Mask Technology for Integrated Circuits and Microcomponents, 2003, Sonthofen, Germany

Abstract

Electron Projection Lithography ( EPL) is a leading candidate for the sub-65 nm lithography regime (1),(2). The development of a low-distortion mask is critical to the success of EPL. EPL has traditionally used either a stencil format mask with a single scatterer layer having the pattern represented by voids in the membrane (3), or a continuous membrane format mask with a patterned scatterer layer supported by an unperforated membrane(4).

Citation Download Citation

J. Greschner, T. Bayer, S. Kalt, H. Weiss, Phillip L. Reu, Roxann L. Engelstad, Obert R. Wood II, Carey M. Thiel, Michael S. Gordon, Rajinder S. Dhaliwal, Christopher F. Robinson, and Hans C. Pfeiffer "Ultrathin-membrane EPL masks", Proc. SPIE 5148, 19th European Conference on Mask Technology for Integrated Circuits and Microcomponents, (28 May 2003); https://doi.org/10.1117/12.515090

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