Chemical treatment of getter films on wafers prior to vacuum packaging

Marco Moraja; Marco Amiotti; Heather Florence

doi:10.1117/12.525099

23 December 2003 Chemical treatment of getter films on wafers prior to vacuum packaging

Marco Moraja, Marco Amiotti, Heather Florence

Proceedings Volume 5343, Reliability, Testing, and Characterization of MEMS/MOEMS III; (2003) https://doi.org/10.1117/12.525099
Event: Micromachining and Microfabrication, 2004, San Jose, California, United States

Abstract

The patterned getter film at wafer level has been proven to be the viable technical solution to integrate a getter film in vacuum packaged MEMS. The different MEMS vacuum bonding technologies such as eutectic, direct fusion and anodic bonding guarantee a suitable combination of time and temperature to properly activate the getter film. However, before any MEMS vacuum bonding process it has been discovered that a caustic chemical treatment of the getter film both cleans the film and enhances its performance without measurable degradation of its structural integrity. For example, caustic chemical treatment with SC1 with NH₄OH and SC2 with HCl did not affect the morphology and the sorption capacities of the getter film and significantly increased the sorption capacity. The getter film at wafer level can withstand also treatment with a highly aggressive HNO₃ process. Therefore, we demonstrated the full compatibility of the getter film towards both temperature and chemical treatment with regards to the activation and capacity of the getter film.

Citation Download Citation

Marco Moraja, Marco Amiotti, and Heather Florence "Chemical treatment of getter films on wafers prior to vacuum packaging", Proc. SPIE 5343, Reliability, Testing, and Characterization of MEMS/MOEMS III, (23 December 2003); https://doi.org/10.1117/12.525099

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available