High-repetition-rate MPC generator-driven capillary Z-pinch EUV source

Yusuke Teramoto; Hiroto Sato; Kazunori Bessho; Takahiro Shirai; Daiki Yamatani; Tetsu Takemura; Toshio Yokota; Kohkan C. Paul; Kiyoyuki Kabuki; Koji Miyauchi; Mitsuru Ikeuchi; Keisuke Okubo; Kazuaki Hotta; Masaki Yoshioka; Koichi Toyoda

doi:10.1117/12.536036

20 May 2004 High-repetition-rate MPC generator-driven capillary Z-pinch EUV source

Yusuke Teramoto, Hiroto Sato, Kazunori Bessho, Takahiro Shirai, Daiki Yamatani, Tetsu Takemura, Toshio Yokota, Kohkan C. Paul, Kiyoyuki Kabuki, Koji Miyauchi, Mitsuru Ikeuchi, Keisuke Okubo, Kazuaki Hotta, Masaki Yoshioka, Koichi Toyoda

Author Affiliations +

Proceedings Volume 5374, Emerging Lithographic Technologies VIII; (2004) https://doi.org/10.1117/12.536036
Event: Microlithography 2004, 2004, Santa Clara, California, United States

Abstract

Discharge-produced plasma (DPP) based EUV source have been studied and developed at EUVA/Gotenba Branch. Among the several kinds of discharge scheme, a capillary Z-pinch has been employed in our source. An all-solid-state magnetic pulse compression (MPC) generator was used to create a Z-pinch plasma. Low inductance MPC generator provides a pulsed current with about 17 kA of peak amplitude and 350 ns of pulse duration, and allows 2-kHz continuous operation. A water-cooled discharge head was coupled with the MPC generator. In order to evaluate the source performance, electrical energy input to the discharge, EUV radiation power, radiation spatial profile, pinhole image and spectra were observed. 54.4 W/2%BW of 13.5-nm EUV output was achieved at 2-kHz operation. Through the radiation profile measurement and pinhole-camera observation, spatial image of EUV radiation was understood.

Citation Download Citation

Yusuke Teramoto, Hiroto Sato, Kazunori Bessho, Takahiro Shirai, Daiki Yamatani, Tetsu Takemura, Toshio Yokota, Kohkan C. Paul, Kiyoyuki Kabuki, Koji Miyauchi, Mitsuru Ikeuchi, Keisuke Okubo, Kazuaki Hotta, Masaki Yoshioka, and Koichi Toyoda "High-repetition-rate MPC generator-driven capillary Z-pinch EUV source", Proc. SPIE 5374, Emerging Lithographic Technologies VIII, (20 May 2004); https://doi.org/10.1117/12.536036

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