Maskless lithography using drop-on-demand inkjet printing method

Yan Wang; Jeffrey Bokor; Arthur Lee

doi:10.1117/12.541711

20 May 2004 Maskless lithography using drop-on-demand inkjet printing method

Yan Wang, Jeffrey Bokor, Arthur Lee

Proceedings Volume 5374, Emerging Lithographic Technologies VIII; (2004) https://doi.org/10.1117/12.541711
Event: Microlithography 2004, 2004, Santa Clara, California, United States

Abstract

Writing process patterns directly on a substrate with small liquid droplets generated by Drop-On-Demand (DOD) inkjet devices offers a low cost, non-contact, low temperature, flexible, and data driven patterning approach. Existing inkjet printheads have a limited number of inkjet devices, which generate droplets on the scale of tens of microns. In our research, we have developed a monolithic inkjet printhead for maskless lithography based on silicon micro-machining technology. This printhead is composed of a large array of thermal bubble inkjet devices fabricated on a single silicon wafer. A high-resolution video imaging system has recorded stable generation of water droplets down to 3.5 micron. Au patterns as small as 8 micron have been formed on silicon substrates by printing with suspensions of Au nano-particles. Smaller droplet dimensions extending to the nano-scale is supported by theoretical analysis. This printhead technology can form the basis of a maskless lithography system with moderate throughput for building micro and nano-scale electronic circuits and MEMS devices.

Citation Download Citation

Yan Wang, Jeffrey Bokor, and Arthur Lee "Maskless lithography using drop-on-demand inkjet printing method", Proc. SPIE 5374, Emerging Lithographic Technologies VIII, (20 May 2004); https://doi.org/10.1117/12.541711

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