Production of novel materials for 157-nm and 193-nm soft pellicles

Paul A. Zimmerman; Chris van Peski; Daniel Miller; Ryan P. Callahan; Matthew Cashion

doi:10.1117/12.534350

28 May 2004 Production of novel materials for 157-nm and 193-nm soft pellicles

Paul A. Zimmerman, Chris van Peski, Daniel Miller, Ryan P. Callahan, Matthew Cashion

Proceedings Volume 5377, Optical Microlithography XVII; (2004) https://doi.org/10.1117/12.534350
Event: Microlithography 2004, 2004, Santa Clara, California, United States

Abstract

The introduction of 157nm lithography has raised many issues, not the least of which is the requirement of a new material for soft pellicle. At 157nm, the incident energy of 7.9 eV is enough to break any single organic bond. This makes the design of a soft pellicle material quite a challenge. Additionally, previous work in the industry has shown that improving transparency does not necessarily translate into longer pellicle lifetimes. Based on extensive investigation of how existing materials are degrading in the VUV, these new polymer systems have been produced. This study shares detailed structural information about several novel materials developed for use as soft pellicles. Additionally, data is shown for material properties including transmission and lifetime of films under 157 nm and 193 nm exposures.

Citation Download Citation

Paul A. Zimmerman, Chris van Peski, Daniel Miller, Ryan P. Callahan, and Matthew Cashion "Production of novel materials for 157-nm and 193-nm soft pellicles", Proc. SPIE 5377, Optical Microlithography XVII, (28 May 2004); https://doi.org/10.1117/12.534350

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available