Thin film characterization with the differential heterodyne microscope

D. V. Baranov; Evgeny M. Zolotov

doi:10.1117/12.560974

7 April 2004 Thin film characterization with the differential heterodyne microscope

D. V. Baranov, Evgeny M. Zolotov

Proceedings Volume 5478, Laser Optics 2003: Solid State Lasers and Nonlinear Frequency Conversion; (2004) https://doi.org/10.1117/12.560974
Event: Laser Optics 2003, 2003, St. Petersburg, Russian Federation

Abstract

A method of characterization of thin metal film from a complex response of a scanning differential heterodyne microscope is considered. The amplitude and phase responses are related with a reflection coefficient to be depended on film parameters: a thickness and a complex refractive index. The relationship between a sensitivity of the method and characteristics of layers under the semitransparent metal film has been established. It has been demonstrated that the error of the parameter determination can be minimized by changing of the thickness of dielectric layer under the film. The thickness of Au film has been determined experimentally from amplitude response. The possibility to use a phase response of a microscope was considered. The process of further modification of the method has been proposed.

Citation Download Citation

D. V. Baranov and Evgeny M. Zolotov "Thin film characterization with the differential heterodyne microscope", Proc. SPIE 5478, Laser Optics 2003: Solid State Lasers and Nonlinear Frequency Conversion, (7 April 2004); https://doi.org/10.1117/12.560974

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