Thermo-correction of quasi-static optical distortions in optical reducing systems for EUV projection lithography

Sergei Alexandrovich Dimakov; Boris Vladimirovich Kislitsyn

doi:10.1117/12.567532

12 October 2004 Thermo-correction of quasi-state optical distortions in optical reducing systems for EUV projection lithography

Sergei Alexandrovich Dimakov, Boris Vladimirovich Kislitsyn

Author Affiliations +

Proceedings Volume 5553, Advanced Wavefront Control: Methods, Devices, and Applications II; (2004) https://doi.org/10.1117/12.567532
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

Optical reducing systems for the extreme ultraviolet projection lithography are actively developed in the last few years. Optical elements of these systems are required to be of super-high optical quality. For the systems operatingin the 13-nm wavelength range, their optical distortions should not exceed 1 nm in magnitude. Manufacturing of such elements requires large financial injections. In this report, we consider how to use thermal deformation of an optical element exposed to light for improvement of optical quality of the element. It is shown, in particular, that residual quasi-static large-scale (20% of diameter of the element) optical distortions, about 15nm in magnitude, can be compensated with the proposed technique down to 0.5 nm (i.e.≈λ₀/20 - λ₀/30 in the EUV).

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Sergei Alexandrovich Dimakov and Boris Vladimirovich Kislitsyn "Thermo-correction of quasi-state optical distortions in optical reducing systems for EUV projection lithography", Proc. SPIE 5553, Advanced Wavefront Control: Methods, Devices, and Applications II, (12 October 2004); https://doi.org/10.1117/12.567532

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