Femtosecond laser three-dimensional microstructuring inside photosensitive glasses

B. Fisette; M. Meunier

doi:10.1117/12.567244

9 December 2004 Femtosecond laser three-dimensional microstructuring inside photosensitive glasses

B. Fisette, M. Meunier

Proceedings Volume 5578, Photonics North 2004: Photonic Applications in Astronomy, Biomedicine, Imaging, Materials Processing, and Education; (2004) https://doi.org/10.1117/12.567244
Event: Photonics North, 2004, Ottawa, Ontario, Canada

Abstract

Femtosecond laser is used to form three-dimensional (3D) microstructures embedded in Foturan, a photosensitive glass. The microstructures are realized using a three steps process including infrared femtosecond exposure, heating process and etching in an ultrasonic solution of hydrofluoric acid in water. The experiments were carried out using a specially designed ultrafast laser micromachining station, which included a femtosecond laser (Spectra Physics, 110fs, 800nm, 1 mJ/pulse at repetition rate of 1kHz), systems for the delivery, high-precision focusing and spatial-temporal control of the laser beam, and a fully automated and programmed system for the precise target positioning over a prescribed 3D trajectory. Microstructures were compared to those obtained with excimer laser micromachining. Efficiency of the fabrication process will be discussed in terms of the various laser and etching fabrication parameters. This process has some potential interest for the fabrication of 3D microfluidic systems.

Citation Download Citation

B. Fisette and M. Meunier "Femtosecond laser three-dimensional microstructuring inside photosensitive glasses", Proc. SPIE 5578, Photonics North 2004: Photonic Applications in Astronomy, Biomedicine, Imaging, Materials Processing, and Education, (9 December 2004); https://doi.org/10.1117/12.567244

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available