Nano-fabrication of solid materials with UV femtosecond pulses: Part 2

Jan-Hendrik Klein-Wiele; Jozsef Bekesi; Peter Simon

doi:10.1117/12.596761

8 October 2004 Nano-fabrication of solid materials with UV femtosecond pulses: Part 2

Jan-Hendrik Klein-Wiele, Jozsef Bekesi, Peter Simon

Proceedings Volume 5662, Fifth International Symposium on Laser Precision Microfabrication; (2004) https://doi.org/10.1117/12.596761
Event: Fifth International Symposium on Laser Precision Microfabrication, 2004, Nara, Japan

Abstract

Machining of metals and other materials is presented using subpicosecond laser pulses at a wavelength of 248 nm. Aiming at high speed sub-μm patterning of large areas, a combination of mask projection and multiple beam interference techniques are employed. A special interference scheme is discussed that enables phase controlled multiple beam interference and allows the flexible fabrication of a vast variety of complex periodic surface patterns. In combination with a special short-pulse beam homogenization technique, two-dimensional periodic surface structures with feature sizes below 100 nm and excellent quality and reproducibility can be fabricated. The UV laser system used for irradiation is a Ti:Sapphire-Excimer hybrid device generating 30 mJ, 300 fs pulses at 248 nm. The high pulse energy and a flat-top beam profile allow a relatively large irradiation spot size. Operating the system at 300 Hz enables high speed patterning of extended surface areas with sub-μm feature sizes.

Citation Download Citation

Jan-Hendrik Klein-Wiele, Jozsef Bekesi, and Peter Simon "Nano-fabrication of solid materials with UV femtosecond pulses: Part 2", Proc. SPIE 5662, Fifth International Symposium on Laser Precision Microfabrication, (8 October 2004); https://doi.org/10.1117/12.596761

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