Highly reflective coatings for micromechanical mirror arrays operating in the DUV and VUV spectral range

Thilo Sandner; Jan Uwe Schmidt; Harald Schenk; Hubert Lakner; Alexandre Gatto; Minghong Yang; Norbert Kaiser; Stefan Braun; Thomas Foltyn; Andreas Leson

doi:10.1117/12.590522

22 January 2005 Highly reflective coatings for micromechanical mirror arrays operating in the DUV and VUV spectral range

Thilo Sandner, Jan Uwe Schmidt, Harald Schenk, Hubert Lakner, Alexandre Gatto, Minghong Yang, Norbert Kaiser, Stefan Braun, Thomas Foltyn, Andreas Leson

Author Affiliations +

Proceedings Volume 5721, MOEMS Display and Imaging Systems III; (2005) https://doi.org/10.1117/12.590522
Event: MOEMS-MEMS Micro and Nanofabrication, 2005, San Jose, California, United States

Abstract

High reflecting low-stress optical coatings for the next-generation of micro mechanical mirrors have been developed. The optimized metal systems are applicable from VUV and DUV down to the UV and VIS spectral region and can be integrated in the technology of MOEMS, such as spatial light modulators (SLM) and micro scanning mirrors. This optimized metal designs enable to reconcile high optical performances with adequate mechanical properties and convenient CMOS compatibility. Currently, micro-mirror arrays with enhanced highly reflective coatings for DUV (λ = 193 nm) and VUV (λ = 157 nm) exist as prototypes.

Citation Download Citation

Thilo Sandner, Jan Uwe Schmidt, Harald Schenk, Hubert Lakner, Alexandre Gatto, Minghong Yang, Norbert Kaiser, Stefan Braun, Thomas Foltyn, and Andreas Leson "Highly reflective coatings for micromechanical mirror arrays operating in the DUV and VUV spectral range", Proc. SPIE 5721, MOEMS Display and Imaging Systems III, (22 January 2005); https://doi.org/10.1117/12.590522

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