Fabrication of three-dimensional structures by micro stereolithography for electromagnetic absorber applications

Taeksoo Ji; Vijay K. Varadan

doi:10.1117/12.608130

16 May 2005 Fabrication of three-dimensional structures by micro stereolithography for electromagnetic absorber applications

Taeksoo Ji, Vijay K. Varadan

Author Affiliations +

Proceedings Volume 5763, Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology; (2005) https://doi.org/10.1117/12.608130
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2005, San Diego, California, United States

Abstract

In this paper, microstereolithography (MSL) is introduced to fabricate a sophisticated 3D objects in micro size such as hollow pyramidal and helical structures, which are used for electromagnetic absorber applications. The hollow helix can be constructed by staking a hundred layers of 2D annuluses, taking a slight angular increment for the each layer. It is expected that the helices that has ferromagnetic nanoparticle incursions show improve the performance of the electromagnetic absorbers consisting of helix arrays. The paper also presents a new approach to combine the MSL with conventional silicon micromachining process by demonstrating MEMS bridge structures.

Citation Download Citation

Taeksoo Ji and Vijay K. Varadan "Fabrication of three-dimensional structures by micro stereolithography for electromagnetic absorber applications", Proc. SPIE 5763, Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (16 May 2005); https://doi.org/10.1117/12.608130

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available