Paper
3 June 2005 Design and fabrication of a micro optical system for x-ray analysis of biological cells
M. Y. Al Aioubi, P. D. Prewett, S. E. Huq, V. Djakov, A. G. Michette
Author Affiliations +
Abstract
X-ray technology provides a number of powerful tools used in many different areas of science and industry. The ability to focus x-rays is the key to a wide range of applications including medicine (diagnosis and therapy), industrial applications (lithography and inspection), astronomy (space telescopes) and x-ray imaging (microscopy and analysis). This work presents the design and microfabrication of a novel x-ray micro optical system for use in an x-ray microprobe for analysis of biological cells. A reflective micro-optical system capable of focusing a wide range of wavelengths is at an advanced stage of development. The lens system consists of a pair of microfabricated optical elements, one of which has variable curvature providing a unique mechanically-actuated zoom focusing capability. Experiments have been carried out to measure the changes of the focal length (lens curvature) and sensor calibration.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
M. Y. Al Aioubi, P. D. Prewett, S. E. Huq, V. Djakov, and A. G. Michette "Design and fabrication of a micro optical system for x-ray analysis of biological cells", Proc. SPIE 5825, Opto-Ireland 2005: Optoelectronics, Photonic Devices, and Optical Networks, (3 June 2005); https://doi.org/10.1117/12.604507
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CITATIONS
Cited by 5 scholarly publications.
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KEYWORDS
X-rays

Sensors

Optical components

X-ray optics

Microfabrication

Biological research

Reflectors

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