A novel demodulation method in MEMS gyroscope

Woon-Tahk Sung; Jang Gyu Lee; Taesam Kang

doi:10.1117/12.664215

21 March 2006 A novel demodulation method in MEMS gyroscope

Woon-Tahk Sung, Jang Gyu Lee, Taesam Kang

Proceedings Volume 6040, ICMIT 2005: Mechatronics, MEMS, and Smart Materials; 604019 (2006) https://doi.org/10.1117/12.664215
Event: ICMIT 2005: Merchatronics, MEMS, and Smart Materials, 2005, Chongqing, China

Abstract

This paper presents a novel approach for demodulation method of signal processing circuit in MEMS gyroscope. Since the MEMS gyroscope utilizes Coriolis acceleration that produces a modulated signal of the input angular velocity and driving signal, in order to measure the original angular rate, the demodulation process is essentially needed. The conventional AM demodulation process in MEMS gyroscope is sensitive to the phase difference between the output signal and the modulation reference signal. Moreover, the output is easily affected by nonlinear and noisy properties of a multiplying circuit. Proposed method eliminates the phase tuning of the demodulation stage and the multiplying process of the signal processing circuit that are likely to be major error factors of signal processing circuit but are essential parts of the conventional demodulation process in MEMS gyroscope. The proposed method utilized the envelope detection scheme of AM demodulation in communication system and modified it to apply to the electromechanical system of gyroscope. Experiments were accomplished to verify the performances. From the results, the proposed method shows a satisfactory performance without a multiplying component and tuning effort of the phase in signal process circuit.

Citation Download Citation

Woon-Tahk Sung, Jang Gyu Lee, and Taesam Kang "A novel demodulation method in MEMS gyroscope", Proc. SPIE 6040, ICMIT 2005: Mechatronics, MEMS, and Smart Materials, 604019 (21 March 2006); https://doi.org/10.1117/12.664215

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