Lateral melt expulsion and debris deposition during small-scale femtosecond laser ablation

Sergey I. Kudryashov

doi:10.1117/12.647146

1 March 2006 Lateral melt expulsion and debris deposition during small-scale femtosecond laser ablation

Sergey I. Kudryashov

Proceedings Volume 6106, Photon Processing in Microelectronics and Photonics V; 61061C (2006) https://doi.org/10.1117/12.647146
Event: Lasers and Applications in Science and Engineering, 2006, San Jose, California, United States

Abstract

Various ablation processes including melt expulsion and debris deposition are demonstrated for intense laser ablation of bulk crystalline Si samples and thin copper films at different laser fluences by single tightly and multiple loosely focused laser pulses, respectively. Implications of our results to high-intensity femtosecond laser nano- and micro-machining of solids are discussed.

Citation Download Citation

Sergey I. Kudryashov "Lateral melt expulsion and debris deposition during small-scale femtosecond laser ablation", Proc. SPIE 6106, Photon Processing in Microelectronics and Photonics V, 61061C (1 March 2006); https://doi.org/10.1117/12.647146

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