Laser slotting of silicon for inkjet printer heads

Tuan Anh Mai; Delphine Perrottet; Max Wiki; Bernold Richerzhagen

doi:10.1117/12.641382

23 February 2006 Laser slotting of silicon for inkjet printer heads

Tuan Anh Mai, Delphine Perrottet, Max Wiki, Bernold Richerzhagen

Proceedings Volume 6107, Laser-based Micropackaging; 61070I (2006) https://doi.org/10.1117/12.641382
Event: Lasers and Applications in Science and Engineering, 2006, San Jose, California, United States

Abstract

Inside inkjet-printer heads, a silicon chip is used as a barrier between the orifice plate, which contains hundreds of nozzles, and the ink reservoir. The silicon chips used to create the barriers have to be drilled. The conventional manufacturing technique (sandblasting) does not anymore provide satisfactory results for the new generation of printers. The water-jet-guided laser, a hybrid technology which uses a water jet to guide a laser beam, has recently been adapted to this application, showing very promising results combining high processing speed and quality.

Citation Download Citation

Tuan Anh Mai, Delphine Perrottet, Max Wiki, and Bernold Richerzhagen "Laser slotting of silicon for inkjet printer heads", Proc. SPIE 6107, Laser-based Micropackaging, 61070I (23 February 2006); https://doi.org/10.1117/12.641382

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