Monolithic fabrication of hollow ARROW-based sensors

John P. Barber; Evan J. Lunt; Dongliang Yin; Holger Schmidt; Aaron R. Hawkins

doi:10.1117/12.655322

23 January 2006 Monolithic fabrication of hollow ARROW-based sensors

John P. Barber, Evan J. Lunt, Dongliang Yin, Holger Schmidt, Aaron R. Hawkins

Proceedings Volume 6110, Micromachining Technology for Micro-Optics and Nano-Optics IV; 61100H (2006) https://doi.org/10.1117/12.655322
Event: MOEMS-MEMS 2006 Micro and Nanofabrication, 2006, San Jose, California, United States

Abstract

We have developed a fabrication method for hollow anti-resonant reflecting waveguides (ARROW) on planar silicon substrates. Our fabrication technique is a bottom-up process making use of a sacrificial core material which is removed in an acid etch, leaving a hollow channel. This method is compatible with standard silicon processing steps, enabling the production of integrated devices. Using different core materials, we have build hollow ARROW waveguides with different core geometries, and have also demonstrated the fabrication of solid-core waveguides to interface with the hollow ARROWs. By optimizing the layer structure and fabrication process, we can reduce the optical loss of these waveguides to below 0.33/cm for liquid-filled waveguides and 2.4/cm for air-core waveguides.

Citation Download Citation

John P. Barber, Evan J. Lunt, Dongliang Yin, Holger Schmidt, and Aaron R. Hawkins "Monolithic fabrication of hollow ARROW-based sensors", Proc. SPIE 6110, Micromachining Technology for Micro-Optics and Nano-Optics IV, 61100H (23 January 2006); https://doi.org/10.1117/12.655322

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