MEMS analog light processing: an enabling technology for adaptive optical phase control

Andreas Gehner; Michael Wildenhain; Hannes Neumann; Jens Knobbe; Ondrej Komenda

doi:10.1117/12.651731

23 January 2006 MEMS analog light processing: an enabling technology for adaptive optical phase control

Andreas Gehner, Michael Wildenhain, Hannes Neumann, Jens Knobbe, Ondrej Komenda

Proceedings Volume 6113, MEMS/MOEMS Components and Their Applications III; 61130K (2006) https://doi.org/10.1117/12.651731
Event: MOEMS-MEMS 2006 Micro and Nanofabrication, 2006, San Jose, California, United States

Abstract

Various applications in modern optics are demanding for Spatial Light Modulators (SLM) with a true analog light processing capability, e.g. the generation of arbitrary analog phase patterns for an adaptive optical phase control. For that purpose the Fraunhofer IPMS has developed a high-resolution MEMS Micro Mirror Array (MMA) with an integrated active-matrix CMOS address circuitry. The device provides 240 x 200 piston-type mirror elements with 40 μm pixel size, where each of them can be addressed and deflected independently at an 8bit height resolution with a vertical analog deflection range of up to 400 nm suitable for a 2pi phase modulation in the visible. Full user programmability and control is provided by a newly developed comfortable driver software for Windows XP based PCs supporting both a Graphical User Interface (GUI) for stand-alone operation with pre-defined data patterns as well as an open ActiveX programming interface for a direct data feed-through within a closed-loop environment. High-speed data communication is established by an IEEE1394a FireWire interface together with an electronic driving board performing the actual MMA programming and control at a maximum frame rate of up to 500 Hz. Successful application demonstrations have been given in eye aberration correction, coupling efficiency optimization into a monomode fiber, ultra-short laser pulse modulation and diffractive beam shaping. Besides a presentation of the basic device concept the paper will give an overview of the obtained results from these applications.

Citation Download Citation

Andreas Gehner, Michael Wildenhain, Hannes Neumann, Jens Knobbe, and Ondrej Komenda "MEMS analog light processing: an enabling technology for adaptive optical phase control", Proc. SPIE 6113, MEMS/MOEMS Components and Their Applications III, 61130K (23 January 2006); https://doi.org/10.1117/12.651731

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available