High-performance adaptive optics using microscale assembly

Michael Cohn; Kevin Chang; Alexandros Papavasiliou; Scot Oliver; Gina Kim; Gabriel Matus; Zhixiong Xiao; Steven Cheung; KaoSio Saechao; Ryan Roehnelt

doi:10.1117/12.658058

23 January 2006 High-performance adaptive optics using microscale assembly

Michael Cohn, Kevin Chang, Alexandros Papavasiliou, Scot Oliver, Gina Kim, Gabriel Matus, Zhixiong Xiao, Steven Cheung, KaoSio Saechao, Ryan Roehnelt

Author Affiliations +

Proceedings Volume 6113, MEMS/MOEMS Components and Their Applications III; 61130M (2006) https://doi.org/10.1117/12.658058
Event: MOEMS-MEMS 2006 Micro and Nanofabrication, 2006, San Jose, California, United States

Abstract

MicroAssembly Technologies has developed an optical MEMS process based on the batch transfer of microstructures. This "plug and play" process enables integration of ultra-flat SOI reflectors with high-aspect MEMS actuators and high-voltage CMOS driver circuits. Interferometer measurements confirm that assembled mirror devices are extremely flat.

Citation Download Citation

Michael Cohn, Kevin Chang, Alexandros Papavasiliou, Scot Oliver, Gina Kim, Gabriel Matus, Zhixiong Xiao, Steven Cheung, KaoSio Saechao, and Ryan Roehnelt "High-performance adaptive optics using microscale assembly", Proc. SPIE 6113, MEMS/MOEMS Components and Their Applications III, 61130M (23 January 2006); https://doi.org/10.1117/12.658058

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