Paper
27 March 2006 Use of a piezo-driven cantilever beam as a sensor for electrostatic voltmeter
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Abstract
In this paper authors examine the design and implementation of a cantilever beam-style probe for non-contacting electrostatic voltmeter. The beam is driven by a piezoelectric actuator with a feedback loop controlling amplitude of the electrostatic sensor displacement. Choice of the vibration mode and placement of the actuator and sensor are discussed. A simple model for the first three natural frequencies of the beam is constructed and compared with the experimental results.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jerzy Kieres, Maciej A. Noras, and William A. Maryniak "Use of a piezo-driven cantilever beam as a sensor for electrostatic voltmeter", Proc. SPIE 6166, Smart Structures and Materials 2006: Modeling, Signal Processing, and Control, 616611 (27 March 2006); https://doi.org/10.1117/12.657969
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CITATIONS
Cited by 4 scholarly publications.
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KEYWORDS
Sensors

Actuators

Capacitance

Capacitors

Systems modeling

Copper

Laser beam diagnostics

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