Silicon-On-Insulator Technology By Crystallization On Quartz Substrates

H. Baumgart

doi:10.1117/12.961210

26 June 1986 Silicon-On-Insulator Technology By Crystallization On Quartz Substrates

H. Baumgart

Proceedings Volume 0623, Advanced Processing and Characterization of Semiconductors III; (1986) https://doi.org/10.1117/12.961210
Event: O-E/LASE'86 Symposium, 1986, Los Angeles, CA, United States

Abstract

The purpose of the novel zone-melting recrystallization process (ZMR) is to produce single crystalline Si films on Si0₂ of high crystalline perfection, which are suitable for device fabrication and subsequent industrial applications. However, silicon films grown on amorphous insulating substrates without seeding contain regularly spaced subgrain boundaries as their predominant growth defect and to a lesser degree twin boundaries and some grain boundaries. Detailed materials studies have revealed the core structure of these extended defects and the fundamental mechanisms responsible for subgrain boundary formation. The nature and origin of subgrain boundaries is reviewed and a model for polygonization of the initial dislocation arrays is presented. In addition to subgrain boundary formation, silicon films on quartz are subject to microcracking due to thermal mismatch with the substrate. The influence of these residual growth defects and the inherent tensile stress on device performance is evaluated.

Citation Download Citation

H. Baumgart "Silicon-On-Insulator Technology By Crystallization On Quartz Substrates", Proc. SPIE 0623, Advanced Processing and Characterization of Semiconductors III, (26 June 1986); https://doi.org/10.1117/12.961210

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available