Simulation of electron scattering in thin films using Monte-Carlo method in discrete looses approximation

S. S. Borisov; S. I. Zaitsev; E. A. Grachev; N. Ivanov

doi:10.1117/12.693208

31 May 2006 Simulation of electron scattering in thin films using Monte-Carlo method in discrete looses approximation

S. S. Borisov, S. I. Zaitsev, E. A. Grachev, N. Ivanov

Proceedings Volume 6278, Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics; 62780I (2006) https://doi.org/10.1117/12.693208
Event: Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics, 2005, Moscow, Russian Federation

Abstract

Problems of secondary electrons (SE) energy spectrum simulation are discussed in present article. It is shown that secondary electrons shoot energy spectrum (ES) simulated using discrete looses approximation coincides with Landau distribution function.

Citation Download Citation

S. S. Borisov, S. I. Zaitsev, E. A. Grachev, and N. Ivanov "Simulation of electron scattering in thin films using Monte-Carlo method in discrete looses approximation", Proc. SPIE 6278, Seventh Seminar on Problems of Theoretical and Applied Electron and Ion Optics, 62780I (31 May 2006); https://doi.org/10.1117/12.693208

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available